Abstract
We report the growth of a compositionally stratified BaxSr1-xTiO3 (BST) thin film on MgO by metal organic chemical vapor deposition (MOCVD). Real-time control of the precursor flux based on UV absorption spectroscopy was used to systematically vary the ratio of Ba:Sr during deposition. The composition of the film with depth was measured by Rutherford backscattering spectroscopy, and x was found to decrease from 0.87 at the film-air interface to 0.43 near the film-MgO interface.
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