Abstract
Thin films of BN were deposited using an electron beam for evaporating boron and a hot filament for activating N2. The IR spectrum of the deposited film on Si substrates showed a strong absorption at 1097 cm-1 clearly indicating a cubic structure. Scanning electron micrograph and X-ray diffraction patterns confirm the polycrystalline nature of the films. Raman spectra of the films showed peaks at 1056 and 1304 cm-1, which are the characteristic Raman lines for cubic boron nitride.
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