Abstract

Birefringent films of metal oxides have been formed by oblique vapor deposition and their properties were investigated with a view to their application to optical retardation plates. It was found that the films are composed of fine fibrous structures of about 10 nm in diameter with poor crystallinity. The fibrous structure is inclined towards the direction of the vapor incidence. The fibrous and poor crystalline films of Ta 2O 5 and WO 3 thus prepared showed birefringence of about half as much as that of calcite at maximum. The retardation function of the films can be explained in terms of the form of the birefringence caused by the characteristic anisotropic microstructures inside the films.

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