Growth of biaxially textured BaxPb1−xTiO3 ferroelectric thin films on amorphous Si3N4

Abstract

We prepared highly aligned, biaxially textured BaxPb1−xTiO3 (PBT) on amorphous Si3N4 by using an ion-beam-assisted deposited MgO as a template layer. PBT was deposited on a biaxially textured MgO using sol-gel synthesis, metal-organic chemical-vapor deposition, and molecular beam epitaxy. The biaxial texture of the PBT was inherited from the MgO template. The reflection high-energy electron diffraction (RHEED) and cross-section transmission electron microscopy (TEM) experiments suggest that exposure of the MgO template to atmospheric moisture before PBT heteroepitaxy resulted in a significant narrowing of the PBT in-plane orientation distribution. The microstructures of the biaxially textured PBT films were analyzed by x-ray diffraction, RHEED, and TEM. The dynamic contact mode electrostatic force microscopy polarization hysteresis loops confirmed that these films are ferroelectric.