Abstract
BxGa1−xAs layers were grown on GaAs substrates using low-pressure metal-organic vapor-phase epitaxy. Triethylboron, trimethylgallium, and arsine were used as boron, gallium, and arsenic sources. Optimum growth conditions were selected. The layers were studied using X-ray diffraction, secondary-ion mass spectrometry (SIMS), and photocurrent spectroscopy (PCS). The SIMS results showed a uniform boron distribution over the layer thickness. According to the PCS data, the BGaAs band gap decreases as the boron concentration increases.
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