Abstract
This study presents the synthesis of a dense single-wall carbon nanotube (SWNT) networkon a silicon substrate using alcohol as the source gas. The nanosize catalysts required aremade by the reduction of metal compounds in ethanol. The key point in spreadingthe nanoparticles on the substrate, so that the SWNT network can be grownover the entire wafer, is making the substrate surface hydrophilic. This SWNTnetwork is so dense that it can be treated like a thin film. Methods of patterningthis SWNT film with integrated circuit compatible processes are presented anddiscussed for the first time in the literature. Finally, fabrication and characteristicmeasurements of a field effect transistor (FET) using this SWNT film are alsodemonstrated. This FET is shown to have better electronic properties than any otherkind of thin film transistor. This thin film with good electronic properties canbe readily applied in the processing of many other SWNT electronic devices.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.