Abstract
Thin films of barium titanate (BaTiO 3) have been grown on Pt(111)/Si(100) substrates by radio frequency (RF) magnetron sputtering at a substrate temperature of 560–580°C in a mixture of Ar/O 2 atmosphere. Analysis of X-ray diffraction data shows that these films have a single-phase perovskite structure and are tetragonal BaTiO 3 with a (211) orientation. The full width at half maximum (FWHM) of the (211) ω-rocking curve is ∼ 0.54°. The growth direction of the BaTiO 3 (211) lattice planes with respect to the Pt(111) and Si(100) substrate planes during the sputtering process is characterised in detail by X-ray diffraction θ-2θ scans for various χ-angles.
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