Abstract
Thin films of BaCe0.8Y0.2O3−δ (BCYO) and SrZr0.8Y0.2O3-δ (SZYO) with a perovskite structure were deposited on (111)Pt//(111)SrTiO3 (STO) single crystal substrates by an RF-magnetron sputtering method. X-ray diffraction revealed that the BCYO and SZYO thin films were polycrystalline but highly (110)-one-axis oriented with local epitaxy on (111)Pt//(111)STO in the 〈110〉-direction. However, these films have six-fold symmetric domains and each domain showed in-plane rotations because of the lattice mismatches between (110)BCYO or (110)SZYO and (111)Pt. Especially, the BCYO film showed larger in-plane rotation than that of SZYO because of its larger lattice mismatch.
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