Abstract
The influence of oxygen on the growth and microstructure of thin iron and nickel films has been investigated with intrinsic stress measurement. Under the best uhv conditions iron grows via columnar grain growth exhibiting only tensile stress, while nickel shows the more complex stress behaviour of pronounced island growth. In the latter case oxygen causes a gradual transformation to the columnar grain growth mode at an oxygen partial pressure of 1 × 10 −8 hPa. In the columnar grain growth regime of both metals oxygen incorporation leads to a compressive stress contribution. A further increase of the oxygen partial pressure leads to the formation of the respective oxide films.
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