Growth mechanism of nano-plates structured SnS films on different substrates in glancing angle deposition method

Abstract

In this work, Tin (II) sulfide films have been deposited on glass, Indium Tin Oxide, and Fluorinated Tin Oxide substrates at the deposition angles of 0º, 65º, and 85º using Physical Vapor Deposition method equipped with Glancing Angle Deposition technique. Based on the results obtained from the X-ray diffraction technique, the crystalline structure of substrates and the angle of depositions along with their effects on the structure of SnS nano-plates have been investigated. Using Raman analysis, the phonons lifetime of the samples was found to change with the type of substrate and the employed deposition angle. Based Energy-dispersive X-ray spectroscopy analysis, the atomic ratio of Sn to S was observed to change with the change of deposition angle, substrate type and variation the diameter of nano-plates. This phenomenon resulted the formation of the second phase of Sn2S3 which was confirmed by Raman and X-ray diffraction patterns. The nano-sheets-like growth of all the samples has been confirmed using Felid Emission Scanning Electron Microscopy analysis. For further morphological studies, the Atomic Force Microscopy analysis has been applied, by which the direct relation between the substrate roughness and the final structure of the samples has been observed. The relation between the substrate roughness and the deposition angle in the growth process of SnS nano-sheets has been explained.