Growth evolution of rapid grown aligned carbon nanotube forests without water vapor on Fe/Al 2O 3/SiO 2/Si substrate

Abstract

This paper presents the growth evolutions in terms of the structure, growth direction and density of rapid grown carbon nanotube (CNT) forests observed by scanning and transmission electron microcopies (SEM/TEM). A thermal CVD system at around 700 °C was used with a catalyst of Fe films deposited on thin alumina (Al 2O 3) supporting layers, a very fast raising time to the growth temperature below 25 °C/s, and a carbon source gas of acetylene diluted with hydrogen and nitrogen without water vapor. Activity of Fe catalyst nanoparticles was maintained for 5 min during CVD process, and it results in CNT forests with heights up to 0.6 mm. SEM images suggest that the disorder in CNT alignment at the initial stage of CNTs plays a critical role in the formation of continuous CNT growth. Also, the prolonged heating process leads to increased disorder in CNT alignment that may be due to the oxidation process occurring at the Fe nanoparticles. TEM images revealed that both double- and few-walled CNTs with diameters of 5–7 nm were obtained and the CNT density was controlled by thickness of Fe catalytic layer. The number of experiments at the same conditions showed a very good repeatability and reproducibility of rapid grown CNT forests.