Abstract
Nonpolar gallium nitride (GaN) epitaxial film was grown on a nearly lattice-matched (1 0 0) γ-LiAlO 2 substrate by a versatile chemical vapor deposition (CVD) method. LiAlO 2 single crystal was grown by the Czochralski (Cz) method. Epi-ready LiAlO 2 single-crystal substrate with RMS roughness of 0.24–0.32 nm were used for all experiments. The dependence of growth characteristics on the growth temperatures and deposition time was investigated. The orientation of GaN film was identified as (1 0 1¯ 0) m-plane by X-ray diffraction pattern. The characterization of detailed structure of the nonpolar GaN epilayer was done by transmission electron microscopy (TEM). Optical properties examined by photoluminescence spectra exhibit a strong near-band-edge emission peak at 3.37 eV and a weak yellow band emission.
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