Abstract
The growth and structure of titanium evaporated films formed on NaCl substrates held at various temperatures have been studied by electron microscopy. Fcc and hcp crystallites with the (001), (110), (10.1), (2 1 .0) and (00.1) planes parallel to the substrate surface have been observed. Fcc and hcp crystallites with the (001) and (10.1) orientations have been found to be more stable than those with (110) and (2 1 .0) orientations. The formation energy of the hcp crystallites with (00.1) orientation was higher than that of the other fcc and hcp crystallites. Fcc crystallites with the (001) orientation grew mainly at an early growth stage but subsequently hcp crystallites also grew. The dominant growth of the fcc crystallites in the film containing both fcc and hcp crystallites caused wrinkles in the film. The close connection between the fcc crystallites and the fcc γ-phase crystal has been pointed out.
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