Growth and Structure of Polycrystalline Indium Phosphide Layers on Molybdenum Sheets

Abstract

Pinholeless polycrystalline indium phosphide layers were grown on molybdenum sheets at temperatures lower than 600°C using indium and phosphorus trichloride as the source materials. The low activation energy of the deposition rates and weak dependence of the rates on the partial pressure of indium monochloride suggest that surface processes play an important role in the growth of polycrystalline films. It was ascertained by an x‐ray diffraction measurement that the {110} and {331} orientations become noticeable with increasing thickness at higher temperatures, whereas the <111> orientation is dominant at lower growth temperatures. The development of the <110> orientation produces films with a columnar structure, which could be explained by the dependence of the growth rate on the crystallographic orientation.