Abstract

ABSTRACTThirty-period In0.28Ga0.72As(100Å)/GaAs (100Å) multiple quantum wells (MQWs) have been grown by molecular beam epitaxy on (lOO)-oriented GaAs substrate with a 0.5μm-thick InyGa1-yAs (0≤y≤0.28) buffer layer interposed between the QW layer and the GaAs substrate. The MQWs with y close to the average InAs mole fraction of the QW layer exhibited good crystalline quality. It indicates that the strain is well-balanced between the GaAs and In0.28Ga0.72As layer. A significant change in their photoluminescence spectra has been observed when annealed above 750δC by means of rapid thermal annealing, implying a structural disorder in the QW“region.

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