Growth and properties of diamond-like films deposited from cyclohexane-argon mixtures in low-temperature plasma

Abstract

The deposition of diamond-like films on polymer substrates from low-temperature cyclohexane-argon plasma was studied. The deposition rate was found to be proportional to the mass flow rate of cyclohexane vapor and independent of the mass flow rate of argon. The microhardness of the films and the light absorption coefficient in the blue spectral region depend on the ratio between the deposition rate and ion current density.