Abstract

The effect of rapid thermal annealing (RTA) treatment on the growth characteristics of carbon nanotubes (CNTs) was investigated. We observed that Ni catalyst film was agglomerated by RTA treatment, resulting in the formation of Ni nanoparticles. The well-aligned CNTs were grown from the Ni nanoparticles by plasma-enhanced chemical vapor deposition (PECVD). It is shown that the size and distribution of the nanoparticles depend mainly on the annealing temperature and initial thickness of the catalytic metal layer. Also, it was found that the CNTs grown through RTA treatment had the more improved field emission characteristics than those of as-grown CNTs. This might be due to the increase of field enhancement factor, which resulted from the reduction of field screening effect.

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