Grooved fluorescent plate for parallel-detection electron energy loss spectroscopy in ultra-high-voltage electron microscopy

Abstract

The fluorescent plates in parallel-detection electron-energy-loss spectroscopy are studied from the viewpoint of the spatial resolution and the background of spectra. The self-supporting fluorescent plate is proposed in order to reduce the backscattered electrons from the supporting substrate of the fluorescent plate. Many fine grooves are cut on the thin Si plate and are filled with phosphor powder. This “grooved fluorescent plate” is effective to suppress the blur of spectra although the intensity decreases slightly.