Abstract
Silicon nitride ceramics are widely used in various industrial fields because of their excellent characteristics: high hardness, high elastic modulus, abrasion resistance, and high heat resistance. Diamond wheel grinding is the predominant and most productive method to machine silicon nitride ceramics. However, a lot of heat is generated due to high friction between a diamond grinding wheel and extremely rigid silicon nitride during grinding. This causes surface/subsurface damage, wheel wear, etc., which impairs the surface quality of silicon nitride. This impairment can restrict the use of silicon nitride ceramic components. To improve the surface quality and service life of grinding wheels, a laser macro-micro combination structured grinding (LMMCSG) method was presented. The results indicated that the grinding force ratio and surface roughness when using LMMCSG were respectively 31% and 40% lower than the grinding force ratio and surface roughness when using conventional grinding. Moreover, the LMMCSG method effectively reduced the wheel wear and workpiece subsurface damage.
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