Grazing incidence x-ray scattering evaluation of polished surface quality, and associated instrumental and residual particle effects

Abstract

The method involves precise measurements of the intensity and second of arc angular distribution of soft x rays in the 8.34–44.7-Å region reflected at 1–2° from small optical flats. A simple method of inferring the presence of roughness on more than one scale of correlation length is used in the analysis. Effort has concentrated on problems with accuracy and reproducibility of results, troubles having been traced to detector window inhomogeneities, mechanical instability, and dust residing on the test surfaces. The latter is most noticeable at long wavelengths.