Grazing Incidence X-Ray Diffraction using Synchrotron Light at SLRI

Abstract

This work demonstrates the capability of the grazing incidence X-ray diffraction technique using synchrotron light. The measurement system is set up at the BL7.2W:MX beamline of the Synchrotron Light Research Institute (SLRI). The beamline utilizes hard X-rays from a 6.5-Tesla Superconducting Wavelength Shifter. The photon energy can be chosen between 7 to 18 keV with a photon flux of more than 1010 photons/sec at 100mA stored electron beam. The X-ray beam size can be reduced down to 20 microns, allowing XRD measurements in grazing geometry, thus crystal structures of very thin films with a thickness of tens nanometers can be identified. The diffraction patterns are recorded with a 2D CCD detector, allowing more diffraction spots of single crystalline films to be recorded.