Abstract
The laboratory implementation of grazing incidence in-plane X-ray diffraction, using an unmodified commercial diffractometer, is described. Low resolution, high intensity measurements are illustrated in the study of the in-plane lattice parameters and texture of a thin polycrystalline ZnO film on glass, the in-plane order in Cd arachidate Langmuir–Blodgett films, and the depth dependence of the lattice parameter in graded Si–Ge epilayers. Use of an asymmetrically cut Ge crystal to compress and monochromate the beam provides a high resolution setting, appropriate to measurement of the in-plane mosaic of mismatched epilayers such as GaN on sapphire.
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