Grating pitch comparator traceable to the Cr atom transition frequency

Abstract

Calibration of the grating pitch typically requires metrological instruments or diffraction techniques. The traceability and stability demands for laser wavelength in these techniques present substantial challenges for on-site grating calibration. This paper introduces a novel traceability approach to grating pitch calibration using a grating pitch comparator that utilizes the transition frequency of the chromium. The chromium transition frequency is converted into a chromium grating through atom lithography, establishing a self-traceable length standard dCr = 212.7787 ± 0.0049 nm. Calibration of the test grating’s pitch is achieved by comparing the phase shift caused by the simultaneous movement of the chromium grating and the test grating. By using the dCr, this approach combines the high-accuracy of fundamental physical constants with the environmental stability of grating interferometers, eliminating the need for measuring laser wavelength, air refraction, diffraction angles. It significantly enhances the precision and makes more straightforward and portable, crucial for facilitating traceable on-site grating measurements.