Grating/microlens arrays fabricated by hot-melting, self-assembly and replication

Abstract

This paper reports a convenient method to fabricate hybrid optical element of grating/microlens array (GMA) by hot-melting, self-assembly and replication on the same surface. The polydimethylsiloxane (PDMS) microlens array with lens diameters of 700 μm and effective focal length of 3.7 mm is replicated twice from the photoresist microlens array by hot-melting. And the self-assembly gratings with groove density of 886 lines/mm are fabricated on the surface of stretching microlens array by oxygen plasma. A single part of GMA operates across a wavelength spectrum from 450 nm to 650 nm with a maximum resolution of 6.9 nm at 450 nm.