Abstract
A numerical study is presented of the application of two approximate grating theories, the Rayleigh theory and the Beckmann theory, in the soft X-ray region. Comparison with a rigorous electromagnetic theory makes it possible to estimate the wavelengths and angles of incidence for which these theories give accurate results. Mainly, gratings having a sinusoidal groove profile are studied, but results for lamellar and echelette gratings are also discussed.
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