Abstract
The graphitic phases detected in chemical vapour deposited (CVD) ZrC layers were characterized by glancing angle X-ray diffraction. The layers were deposited at different temperatures ranging from 1250 to 1450°C in steps of 50°C. The precursors used were ZrCl 4 and CH 4 in the presence of hydrogen and argon. A total of seven graphitic phases were detected, five of which have been reported in the literature. However, two new hexagonal graphitic phases, P-6m2 (187) and P-62c (190), were also detected. It is proposed that the appearance of these two (new) phases was due to the influence of impurities in the growth region on the growth kinetics. A comprehensive phase identification process was followed to index all observed diffraction lines, followed by Rietveld analysis, to report on phase composition and crystalline properties. A distinct increase in overall graphite phase composition is observed at the higher CVD temperatures, which confirms the impact from graphitization.
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