Abstract
This study described relative humidity (RH) sensing using a graphene/128° YX LiNbO3 surface acoustic wave (SAW) device. The resonant frequency of the device decreased in a two-stage manner as the RH increased. For a low RH range (RH<50%), a frequency downshift of 1.38kHz per 1% RH change was observed. This was attributed to mass loading of the SAW propagation surface due to the adsorption of water molecules by the graphene surface. For a high RH range (RH>50%), a frequency downshift of 2.6kHz per 1% RH change was obtained, which was due to the change in elastic grapheme properties. The mass loading effect of the water layer was less effective at high temperature, resulting in a lower temperature coefficient of resonant frequency (TCF).
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