Abstract

In this paper we discuss the effect of hydrogen and methane content during low-pressure chemical vapor deposition (LPCVD) of graphene on inductively heated copper foils. By increasing the H2/CH4 ratio by a factor of 5 from 25 to 125, different graphene morphologies ranging from dendritic fractals to compact hexagonal islands are obtained. In addition, increasing the hydrogen concentration allows the nucleation rate to be slowed down by a factor of ∼10 thereby high-quality regular hexagonal graphene single crystals of significant size of 0.1 mm are found. From these measurements, we estimate the activation energy for graphene nucleation in low-pressure CVD (2 eV) and propose a phenomenological law for graphene nucleation. As compared to conventional CVD methods, considerable advantages of inductive heating are outlined, and some fundamental aspects of this approach are discussed.

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