Abstract
Detection of thin film such as graphene is important technology for application to industrial products. Auger electron spectroscopy (AES) is well known for analyzing the surface of solid samples with thickness less than 6 nm. AES has been developed as a useful technique for chemical state analysis. However, the chemical state analysis of AES can be performed on limited elements. In this report, we examine the use of Reflection Electron Energy Loss Spectroscopy (REELS) obtained by AES instrument for chemical state analysis of carbon.
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