Graphene Field-Effect Transistors With High Extrinsic <inline-formula> <tex-math notation="LaTeX">${f}_{T}$</tex-math> </inline-formula> and <inline-formula> <tex-math notation="LaTeX">${f}_{\mathrm{max}}$</tex-math> </inline-formula>

Abstract

In this letter, we report on the performance of graphene field-effect transistors (GFETs) in which the extrinsic transit frequency ( ${f}_{T}$ ) and maximum frequency of oscillation ( ${f}_{\text {max}}$ ) showed improved scaling behavior with respect to the gate length ( ${L}_{g}$ ). This improvement was achieved by the use of high-quality graphene in combination with successful optimization of the GFET technology, where extreme low source/drain contact resistances were obtained together with reduced parasitic pad capacitances. GFETs with gate lengths ranging from $0.5~\mu \text{m}$ to $\text {2}~\mu \text{m}$ have been characterized, and extrinsic ${f}_{T}$ and ${f}_{\text {max}}$ frequencies of up to 34 and 37 GHz, respectively, were obtained for GFETs with the shortest gate lengths. Simulations based on a small-signal equivalent circuit model are in good agreement with the measured data. Extrapolation predicts extrinsic ${f}_{T}$ and ${f}_{\text {max}}$ values of approximately 100 GHz at ${L}_{g}=\text {50}$ nm. Further optimization of the GFET technology enables ${f}_{\text {max}}$ values above 100 GHz, which is suitable for many millimeter wave applications.