Abstract
Graphene based electron field emitter arrays consisting of cone-shaped silicon tips, a thin Al2O3 tunnel barrier, and graphene top electrode are fabricated. Due to the monolayered graphene top electrode, the electrons are able to tunnel through the Al2O3 layer and emit into the vacuum. The temperature behavior of the tunnel leakage current as well as the emission current is characterized.
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Schedule a callMore From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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