Abstract
Molybdenum (Mo) thin films were deposited on soda lime glass (SLG) using direct-current (DC) magnetron sputtering at different substrate temperatures to study the diffusion process of Sodium (Na) and Potassium (K). To quantify the concentration of both species, secondary ion mass spectrometry (SIMS) was used. In this paper, a grain diffusion model was developed that incorporates the effect of grain and grain boundary geometrical shape and size in the overall species concentration that SIMS data report. It was concluded that the ratio of grain boundary size and grain size is not constant along the Mo thin film and should be considered a key component when analyzing diffusion processes in thin films.
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