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Abstract
An electrically controllable terahertz (THz) square-loop metamaterial based on tungsten (W)-doped vanadium dioxide (VO2) films was designed and evaluated. The structure acts as both the bandpass filter and micro-heater. The various W concentrated VO2 films used to integrate with the metamaterial were successfully grown through the sol-gel method. The transition temperature decreased by ∼14 K/at% and the resistance–temperature hysteresis curves broadened with higher doping concentrations. By utilizing the designed device, the transmitted THz wave can be tuned precisely, and the modulation depth can reach up to 0.72 in the 0.3–0.7 THz passband with a bias voltage below 2 V.
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