Abstract

We have investigated and compared various methods of fabricating silicon nano-needles of 100–200 nm in diameter and 1–2 µm in length for visualization of motor protein movement. Owing to their thin and long geometry, the needles are ideal to amplify and visualize angular movement. To enable highly localized protein attachment, a well-defined attachment point at one end of the needles was prepared. Fabrication by electron-beam lithography as well as by a highly parallel non-lithographic process were implemented and compared. Sensitive angular motion amplification was demonstrated by attachment of needles to F1 ATPase rotation motor proteins. In this report we characterize the fabrication processes, discuss the differences, and present the results of motor protein motion visualization.

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