Abstract
Au clusters were formed on the GaAs(111)B substrate by the field evaporation of Au atoms using an atomic force microscope (AFM). The obtained clusters appeared as mounds with typical diameters of 100–150 nm and heights of 1.5 nm. Furthermore, GaAs whiskers were grown after annealing by using these clusters as seeds. However, the sites of whiskers did not correspond to the sites of the Au clusters existing before annealing and growth. These results indicate that Au cluster formation by the AFM method did some damage to the substrate and permitted Au to diffuse into the substrate at relatively low temperatures.
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