Abstract
In this paper, we present results of a study on Ni/sub 81/Fe/sub 19/Cu MLs deposited using a four-source DC magnetron sputtering system operated in planetary mode. A significant change of GMR value with deposition conditions, especially base pressure and deposition pressure, has been observed for Ni/sub 18/Fe/sub 19//Cu MLs. With an optimized process, we have obtained a GMR response of 9.5% with a field sensitivity of 0.44%/Oe for Si/[(Ni/sub 81/Fe/sub 19/)17 /spl Aring//Cu20 /spl Aring/]/sub 20/ MLs without an Fe buffer layer. The insertion of a very thin layer of a second magnetic species at nonmagnetic/magnetic interfaces in the ML stack makes GMR response either sensitive or less sensitive to deposition conditions depending on the species selected. We believe that the key to obtaining large GMR values in Ni/sub 81/Fe/sub 19//Cu MLs lies in the control of layered structure and interfacial chemistry. In addition, these Ni/sub 81/Fe/sub 19//Cu MLs survive high temperature annealing up to 250/spl deg/C, retaining a GMR value of 8.5%. The thermal stability exhibited by these MLs over the temperature range for device fabrication makes them valuable for high density recording head sensor applications.
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