Abstract
The emerging potential of glow-discharge (GD) spectroscopies for the analysis of thin films is examined. So far, this technique has not been explored fully to the point where it is generally accepted in the surface analysis community as a potential alternative to other better established techniques. However, the analytical features of GDs coupled to optical emission spectrometry (OES) and mass spectrometry (MS) show an important niche of applications in surface analysis for GD techniques. To show the state of the art, we present a variety of examples of depth-profiling analysis of thin and ultra-thin films using GDs coupled to OES and MS.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
