Abstract
Glow-discharge ion-sorption, magnetic-field-enhanced, MEMS silicon/glass high vacuum micropump has been shown. The 20mm×12mm×3.4mm pump (dead volume circa 0.08cm3) pumps 25cm3 chamber down to 5×10−6hPa (mbar) in several minutes, self-pumping limit is 3×10−7hPa. Preliminary tests have shown no significant degradation of the device at least for 3h of the continuous work.
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