Abstract
The glow characteristics and deposited film structures of fluorocarbon monomers in radio-frequency glow discharges are investigated using CH2F2 and C2H2F4, which were compared to hydrocarbon monomer such as CH4. The glow was characterized and investigated by optical photography, optical emission spectroscopy, and Fourier transform infrared spectrometry. The glow differences were attributed to the nature of the luminous gas phase in respect to polymer-forming species.
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