Abstract
Glass waveguides produced by ion-exchange are used for passive integrated optics applications. In order to predict the properties of these waveguides it is necessary to know the refractive index profile. Optical measurements are of limited usefulness for this purpose. However, the waveguides can also be characterized through the concentration profiles of the exchanged ions. With Rutherford Backscattering Spectrometry (RBS) it is possible to determine depth profiles of the exchanged ions in the glass substrate. Results for monomode, multimode and buried waveguides are reported and in the case of multimode waveguides they are compared with those obtained by optical mode analysis.
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