Abstract
Abstract The interest in glass as a semiconductor packaging material has continually grown over the past several years. Glass, and its material properties, provides many opportunities for application in advanced packaging. As an insulator, glass is well-suited due to its low electrical loss, particularly at high frequencies. The relatively high stiffness and ability to adjust coefficient of thermal expansion gives the opportunity to better manage warp in glass core substrates as well as bonded stacks, either in carrier or interposer applications. Forming processes allow the potential to both manufacture in a panel format as well as at thicknesses as low as 100 um. Both of these give real opportunity to provide cost-effective packaging solutions. Via fabrication technology development continues to advance providing via diameters < 20 um in size in a production ready environment. As the industry adopts glass solutions, significant advancements have been made in downstream processes such as glass handling and both via and surface metallization. Additionally, data showing the ability to achieve electrical and thermo-mechanical reliability is readily available. Here we provide the latest data on reliability and new product applications for glass-based solutions.
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