Abstract

We have measured Au and Ni thin films on a quartz glass using both scanning tunnelling microscopy (STM) and glancing-incidence and -take-off x-ray fluorescence (GIT-XRF). The STM image shows that the film surface con-sists of grains of several tens of nanometres in size. Although the GIT-XRF method utilizes a total reflection phenomenon which occurs on a flat surface, a surface roughness of 10 nm does not affect the GIT-XRF analysis. Moreover, we demonstrate for the first time that STM observation is possible under x-ray irradiation.

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