GISAXS and GISANS as metrology technique for understanding the 3D morphology of block copolymer thin films

Abstract

Grazing incidence small angle X-ray scattering (GISAXS) and grazing incidence small angle neutron scattering (GISANS) have developed as advanced thin film characterization methods, which enables the detection of the three-dimensional (3D) film morphology. In particular thin block copolymer films have been successfully probed with GISAXS and GISANS. Accessing the 3D morphology and understanding the 3D defects in block copolymer thin films used to pattern surfaces makes both, GISAXS and GISANS, interesting as metrology techniques. Since block copolymer films show a great promise in terms of enabling sub-10nm patterns dimension formation for high volume integrated circuit manufacturing, a metrology to measure and quantify dimensions and defects is essential. Within this feature article selected examples of GISAXS and GISANS investigations probing the morphology of block copolymer films are presented, after a general introduction to the GISAXS and GISANS methods.