Gigatron ® — a new source for low-pressure plasmas

Abstract

A linearly extended microwave plasma source was developed that is used in the pressure range below 1 kPa. In the Gigatron ® device, the microwaves (f=2.45 GHz) are coupled into the vacuum chamber in the form of a coaxial waveguide, consisting of an inner copper rod and a surrounding quartz tube with atmospheric pressure between them. The plasma is produced outside the quartz tube and forms the outer conductor of a coaxial waveguide. The homogeneity and the extension of the plasma were investigated with respect to process parameters as a function on the radial and axial distances from the plasma source. It is shown that the plasma can be extended to a length of more than 1 m for an applied microwave power of 1.2 kW.