Abstract

Sputter-deposited magnetostrictive films present a new and interesting approach to realizing cantilever- and membrane-type actuators or resonant sensors in microsystems as they offer features like contactless, high frequency operation, simple actuator designs and a cost-effective manufacturing technique. An essential development was the preparation of low field positive and negative giant magnetostrictive amorphous, or multilayered thin film materials with magnetostriction exceeding 300 ppm at 0.02 T. Using these optimized films, Si-based microsystems (micropump, linear ultrasonic motor) have been realized which demonstrate the potential of magnetostrictive thin film actuators.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.