Abstract
Magnetoelectric (ME) thin film cantilever type sensors made of AlN and FeCoSiB are operated in vacuum, reducing air damping and thus increasing the ME coefficient and improving the limit of detection (LOD) for ac-magnetic fields. Depending on the sensor geometry, the response is increased by a factor of 5 resulting in a ME coefficient of 20 kV/cmOe at 152 Hz and by a factor of 11 with 12 kV/cmOe at 4.7 kHz and an improvement in LOD by an order of magnitude. Modelling these cantilevers reveals dominant contributions of viscoelastic and molecular damping above and intrinsic damping below 10−2 mbar, respectively.
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