Abstract
Progress in the wireless communication requires higher frequency bandpass filters, and the bulk acoustic-wave filter is especially the key device for the GHz-range communication. Its resonance frequencies depend on the elastic constants of individual layers, but it is never straightforward to measure them. In this study, we apply resonant ultrasound spectroscopy to a GHz-range free-standing AlN/Ru/Cr resonator to simultaneously determine the elastic constant of each layer. Using picosecond ultrasonics, we measure free-vibration resonance frequencies up to ∼70 GHz and inversely determine it. The obtained values are reasonable as thin films elasticity, confirming the applicability of the proposed method.
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