Gettering of impurities in solar silicon

Abstract

Electrical properties of crystalline silicon wafers used for photovoltaı̈cs are degraded by metallic impurity atoms. Such atoms are introduced during the crystal growth or during the processing steps needed to prepare solar cells. External gettering treatments such as phosphorus diffusion from a POCl 3 source or Al–Si alloying are needed to restore or to improve the bulk electrical properties of the material. Monocrystalline wafers can be easily ugraded by such treatments. In multicrystalline silicon wafers, external gettering by phosphorus diffusion, as well as by Al–Si alloying are efficient, provided the temperature does not exceed 900°C. Longer treatments (2–4 h) are needed in order to increase the minority carrier diffusion length beyond the wafer thickness. So longer times are necessary to dissolve metallic atom containing precipitates. However, if the major part of the wafer is neatly improved, some regions containing dislocation tangles are poorly modified. In such regions, impurities could be involved in the formation of silicates which cannot be dissolved during the gettering treatment. Nevertheless, external gettering treatments are able to clean efficiently single crystalline and multicrystalline silicon wafers, provided the oxygen concentration and the defect density are not too high and are homogeneously distributed.