GET 186–2017 State Primary Standard of Units of Ellipsometric Angles

Abstract

The composition, operating principle, and basic metrological characteristics of GET 186–2017, the State Primary Standard of units of ellipsometric angles, a Standard that supports measurement of the two-dimensional spatial distribution of ellipsometric angles, are described. The structure of GET 186–2017 includes a spectral ellipsometer equipped with a x, y-stage for measurements on a grid of 10 × 10 points and an interference profilometer by means of which a two-dimensional map of deviations from 90° of the normals to the surface of an object may be measured. Measurements are not performed at scanning points where the deviation of the normal exceeds 0.01°. Through measurement of the two-dimensional spatial distribution of ellipsometric angles it is possible to establish the spatial distribution of the thickness and complex indicator of refraction of the coatings across the area of a test article. GET 186–2017 supports the uniformity of measurements in highly important trends in science and technology, such as microelectronics, optics, and instrument construction. The principal users of GET 186–2017 are organizations involved in the development of new articles in microelectronics, solar batteries, and optics, in particular, laser gyroscopes. Ordered multilayer structures deposited on a substrate where the thickness of these structures is monitored by means of different types of ellipsometers, including image ellipsometers, are components of such structures.