Abstract
Phase zone plates with high efficiencies are required in x-ray microscopy to meet the demands of imaging specimens with a low radiation dose and a high contrast. Since the size of the resolution element is equal to the width of the outermost zone and the phase shift is a function of the thickness of the used zone plate material, the fabrication of phase zone plates can lead to high aspect ratios, i.e. to high ratios of the height to the width of the zone.KeywordsHigh Aspect RatioZone WidthZone PlateTitanium LayerHigh Frequency PowerThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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